悬臂桨
Bracket Paddle

该产品是半导体晶圆装载系统是关键部件。
其性能稳定，在高温环境不变形，晶圆装载量大，适用于机器人自动装载好搬运系统。
由于悬臂桨截面稳定不变形，使用利用现有的炉管制备更大规格晶圆成为可能。
悬臂桨应用于LPCVD，能极大的延长了维护清洗周期。

Cantilever blades are key components of wafer loading systems in semiconductor and solar applications.
The cantilever blade has maximum wafer load and high temperature performance without deflection. It is suitable for robot automatic loading stations and conveying systems.
Due to the lack of deflection and cross-section of the cantilever blades, existing furnace tubes can be used for larger chip size modifications.
The cantilever blade greatly prolongs the processing time between cleaning and greatly reduces particles in LPCVD applications. This is because the thermal expansion between the cantilever blade and typical process sediment is very matched.